1This is dataplot data file     SPAGON3.DAT
2Pat Spagon (Sematech) semi-conductor wafer film thickness
3Source--Hurwitz, Arnon and Spagon, Pat (19xx).
4        Statistical Methods for Test Procedures
5        Sematech Report. Sections 1.3.1.1 and 1.3.2.2
6
7Number of observations             = 16
8Number of variables per line image =  2
9Order of variables on a line image--
10   1. Response variable Y1 = wafer thickness for test 1
11   2. Response variable Y2 = wafer thickness for test 2
12Statistics category--1-factor analysis
13Note--This file is a combined version of SPAGON1.DAT
14      and SPAGON2.DAT
15      It is also a "matricized" (= 2-column) version of SPAGON3.DAT
16
17To read this file into Dataplot--
18   SKIP 25
19   READ SPAGON3.DAT Y1 Y2
20
21
22      Y1                  Y2
23wafer thickness     wafer thickness
24    test 1              test 2
25------------------------------------
26     2987                3163
27     3238                3577
28     3459                2944
29     3361                3038
30     3487                3365
31     2884                3068
32     3405                3133
33     3034                3013
34     3281                2938
35     3258                2974
36     3039                3242
37     3191                2781
38     3086                3151
39     3300                3744
40     2980                3029
41     3210                3240
42