1* a M5 line (26um wide, 1um thick) over Si substrate 8um below, sigma=2.6e7 2* 430um thick substrate, sigma=1.5e4 1/(ohm*m) 3* line length=1000um 4.units uM 5* 6* Define substrate, sigma=1.5e4 1/(m*ohm)= 0.015 1/(um*ohm) 7g1 x1 = -1500 y1 = -1500 z1 = 0 8+ x2 = 1500 y2 = -1500 z2 = 0 9+ x3 = 1500 y3 = 1500 z3 = 0 10+ thick = 430 sigma= 0.015 11*+ seg1 = 100 seg2 = 100 12+ file=NONE 13* under the trace 14+ contact decay_rect (0,0,0,50,2000,13,3000,500,3000) 15* the contacts 16+ contact decay_rect (0,-1000,0,30,30,10,10,3000,3000) 17+ contact decay_rect (0, 1000,0,30,30,10,10,3000,3000) 18+ 19+ nhinc = 3 rh=2 20* nodes to reference later: 21+ np1 (0,-1000,0) 22+ np2 (0,1000,0) 23* 24* line width=26um 25* thick h=1um sigma=2.6e7 1/(m*ohm)=26 1/(um*ohm) 26* 27NS1 x=0 y=-1000 z=223.5 28NS2 x=0 y=1000 z=223.5 29EM5 NS1 NS2 w=26 h=1 sigma=26 nwinc=4 nhinc=1 30.equiv NS2 np2 31.external NS1 np1 32* 33.freq fmin=3.3e8 fmax=3.3e8 ndec=1 34.end 35